Abrasive-free polishing of hard disk substrate with H2O2-C4H10O2-Na2S2O5 slurry
نویسندگان
چکیده
منابع مشابه
Effect of Chemical Additive on Fixed Abrasive Polishing of LBO Crystal with Non-water Based Slurry
Non-water based fixed abrasive polishing was adopted to manufacture LBO crystal for nano precision surface quality because of its deliquescent. Ethyl alcohol was selected as the non-water based slurry solvent and ethanediamine, lactic acid, hydrogen peroxide was added in the slurry as a chemical additive, respectively. Effect of different additives with non-water based slurry on material remova...
متن کاملChemical Mechanical Polishing Slurry for Tungsten in Ulsi with Large Particle Size Colloidal Silica Nano-abrasive
Silica sol nano-abrasives with large particle are prepared and characterized by TEM, PCS and Zeta potential in this paper. Results show that the silica sol nano-abrasives about 100nm are of higher stability (Zeta potential: -65mV) and narrow distribution of particle size. And then alkali CMP slurries for tungsten containing self-made silica sol nanoabrasives are prepared and applied. CMP result...
متن کاملPreparation and Polishing Properties of Spherical Porous Silica Abrasive
Problem statement: Abrasive is one of key influencing factors on the polished surface quality in Chemical Mechanical Polishing (CMP). Solid abrasives in CMP slurries are easy to cause polishing scratches. It is well known that reducing the hardness of abrasives would improve the polished surface quality. Therefore, the change in structure or shape of the abrasives means a change in polished sur...
متن کاملModeling of Polishing Mechanism in Magnetic Abrasive Polishing
Magnetic Abrasive Polishing (MAP) is a super-finishing process primarily used for polishing of nonmagnetic and hard materials like, ceramics and stainless steel. This paper deals with the detailed parametric study in polishing of stainless steel work surface. Statistically designed experiments based on Taguchi methods show that size-ratio, tool-work surface clearance, polishing speed, magnetic ...
متن کاملAbrasive Flow Polishing of Micro Bores
This report shares the feasibility study results of abrasive flow polishing of microbores of size φ500 μm or smaller and 25∼50 in aspect ratio for both metal and ceramic materials. A polishing device was designed and built up so as to create enough turbulence for facilitating the polishing at the inner walls of the micro-bore. Polishing of micro-bores on 3 materials: S45C, SS304 and Zr2O3 of le...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Friction
سال: 2013
ISSN: 2223-7690,2223-7704
DOI: 10.1007/s40544-013-0032-0